Lam Research Faces Patent Challenges In Korea Over Cam Lock Electrode Clamp

Lam Research Faces Patent Challenges In Korea Over Cam Lock Electrode Clamp
(Source: Lam Research)

Lam Research Corp. is confronting a pair of invalidation petitions in South Korea targeting its patent related to cam lock clamp technology used in semiconductor processing equipment. 

South Korean companies Platec and WillbeS&T filed separate invalidation actions with the Korean Intellectual Property Trial and Appeal Board (KIPTAB) against Korean Patent No. 1708060, titled "Cam Lock Electrode Clamp," which is owned by Lam Research.

Platec filed its petition in July 2024, while WillbeS&T followed with its own filing in May 2025. The patent was originally filed by Lam in 2009 and registered in February 2017.

The patent covers a cam lock clamp—a mechanical fastening system that enables rapid and secure attachment of consumable components using rotational motion. Common in high-precision industrial equipment, such clamps allow for tool-free mounting and removal, streamlining replacement cycles.

According to the patent specification, the clamp comprises a stud with a head at one end and a spring-supporting section at the other. A socket is concentrically coupled around the stud, exposing its head above. The socket is designed to be firmly attached to a consumable material. A camshaft with an eccentric cutout engages the stud’s head, locking it in place when the system is activated.

KIPTAB's review of the invalidation petitions is currently in progress.


▷Related Article: Lam Research Faces Multiple Patent Challenges In Korea Over Plasma Chamber RF Grounding Patents (2025. 06. 01.)


By PatenTrip


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