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| (Source: Lam Research) |
Lam Research Corp. is facing a wave of legal challenges in South Korea, as several local companies have filed invalidation and scope confirmation actions targeting two of its patents related to radio frequency (RF) grounding in plasma processing chambers.
South Korean Patent Nos. KR2201934 and KR2285582, both titled "Radio Frequency (RF) Ground Return Arrangements," are at the center of multiple proceedings before the Korean Intellectual Property Trial and Appeal Board (KIPTAB).
With respect to the '934 patent, One Semicon filed an invalidation petition in September 2024, followed by CMTX in December 2024. CMTX also filed a non-infringement confirmation action in January 2025, seeking a ruling that its technology does not fall within the scope of the patent. Non-infringement confirmation trials in Korea are defensive proceedings used to preempt potential infringement claims.
As for the '582 patent, Worldex filed an invalidation action in June 2024, One Semicon in September 2024, and CMTX again in December 2024. CMTX has also filed a corresponding non-infringement confirmation action against the '582 patent.
Both patents relate to structures designed to maintain and stabilize plasma in a plasma processing chamber. The inventions focus on confining the plasma using a confinement ring—an essential component for improving plasma uniformity and etch quality.
Specifically, the '934 patent describes a confinement ring that surrounds the lower electrode, while the '582 patent includes a support structure for the lower electrode and provides an RF contact path connecting the ring to the RF ground return, enhancing current stability during processing.
Proceedings for all actions are currently ongoing before KIPTAB.
By PatenTrip
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