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| (Source: BCnC) |
BCnC, a South Korea-based manufacturer of consumable parts for semiconductor equipment, has filed invalidation trials against two Korean patents held by Lam Research at the Korean Intellectual Property Tribunal (KIPTAB). The challenges, filed in November 2024, target patents KR2182298 and KR2254224, both titled "Bottom and Middle Edge Rings."
The disputed patents cover apparatuses for precise positioning and vertical movement of edge rings used in semiconductor and display substrate processing equipment. Edge rings are components placed around a wafer or substrate during processing to protect the periphery from plasma damage and ensure uniform treatment. The patents describe mechanisms involving a lower support ring and lift pins that enable the edge ring to be raised or lowered, with guide channels that control the vertical motion to prevent lateral movement.
BCnC specializes in consumable components made from materials such as synthetic quartz, natural quartz, silicon, and ceramics, primarily for semiconductor manufacturing applications. The company’s challenge may reflect ongoing competition in the high-spec materials sector for plasma process equipment.
By PatenTrip
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