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| (Source: Milaebo) |
Korean semiconductor equipment manufacturer Milaebo has failed in its attempt to invalidate a patent held by rival Modern Materials Technology (MMTK), according to a recent decision from the Korean Intellectual Property Trial and Appeal Board (IPTAB).
In a ruling issued March 27, 2025, the IPTAB rejected Milaebo's invalidation request targeting MMTK's Korean Patent No. 2316093, titled "A Collecting Byproduct Trapping Device for Semiconductor Manufacturing Process." The patent covers a trap device designed to capture byproducts such as tungsten, titanium, and carbon that are generated during semiconductor manufacturing.
Milaebo originally filed the invalidation challenge in December 2023, arguing that claims 1, 3, 4, and 6 through 10 of the patent should be struck down. However, the tribunal sided with MMTK and upheld the claims in full.
Trap devices play a crucial role in extending equipment life in chip fabrication plants by ensuring cleaner gas flow to subsequent processing stages. The more effectively a trap collects process byproducts, the less contamination downstream equipment experiences.
Milaebo may still appeal the IPTAB's ruling to the Patent Court in Daejeon.
By PatenTrip
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