Korean IP Tribunal Rejects Claim
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| (Source: https://www.kokusai-electric.com/en/company) |
By PatenTrip
Eugene Technology Co. Ltd., a South Korean semiconductor equipment maker, has failed in its attempt to invalidate a patent held by Japan's Kokusai Electric. The decision, which follows an earlier ruling in a separate invalidation trial, centers on a patent tied to an ongoing infringement lawsuit filed by Kokusai Electric earlier this year.
On December 27, 2024, the Korean Intellectual Property Tribunal rejected Eugene Tech's petition to invalidate Kokusai Electric's patent titled "Method for Manufacturing Semiconductor Device, Substrate Processing Device, and Program" (KR2472052). Eugene Tech had challenged claims 1–5, 8–9, 12, 14, and 16–26, arguing that they were invalid, but the tribunal upheld the patent in its entirety.
Eugene Tech has the option to appeal the decision to the Patent Court of Korea within 30 days.
Earlier in December, the tribunal issued a partial invalidation of another Kokusai Electric patent, "Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device" (KR1037961). While some claims in that case were invalidated, others were upheld.
The patents are applicable to Atomic Layer Deposition (ALD) technology, a critical process in semiconductor manufacturing. ALD enables the deposition of ultra-thin films at the atomic level, offering precise thickness control and uniformity, which are essential in advanced fabrication processes.
ALD is widely used in thin film deposition stages of semiconductor production. The technology is implemented through two primary methods: Large Batch Thermal ALD and Mini Batch ALD. Large Batch Thermal ALD processes multiple wafers simultaneously, relying on thermal reactions for deposition, making it ideal for high-volume production. Mini Batch ALD, in contrast, handles fewer wafers at a time but excels in fast process transitions and superior deposition quality, catering to applications that demand precision and flexibility.
The rulings are part of a broader legal battle stemming from a February 2024 lawsuit filed by Kokusai Electric and its South Korean subsidiary, Kook Je Electric Korea, in the Seoul Central District Court. The companies allege that Eugene Tech infringed on four patents related to semiconductor manufacturing equipment. These patents were registered across jurisdictions including South Korea, the United States, Japan, Taiwan, and China between 2011 and 2022.
Kook Je Electric Korea, established in 1993, is the exclusive licensee of Kokusai Electric's patents in South Korea. The subsidiary operates headquarters and production facilities in Cheonan, with additional offices in Pyeongtaek and Icheon.
Kokusai Electric, a leading Japanese supplier of semiconductor equipment, became a publicly traded company on the Tokyo Stock Exchange in October 2023.
By PatenTrip
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