Taekwang Fujikin Fails to Invalidate Entegris Patent in Korea

Semiconductor Filter Technology at the Center of Global Dispute

(Source: https://www.entegris.com/en/home.html)

Taekwang Fujikin, a Busan-based company, has failed in its attempt to invalidate a key patent held by U.S.-based Entegris. 

The patent, titled "Low-Profile Surface Mount Filter" (Korean Registration No. KR1357415), was granted by the Korean Intellectual Property Office (KIPO) in 2014. Entegris has also filed or registered family patents related to this technology in major semiconductor markets, including the U.S., Europe, and Japan.

The patent covers a low-profile surface mount filter used in semiconductor manufacturing processes, designed to handle high-purity gases while reducing the space required for installation. It is particularly suited for modular gas panels and filters gases through multiple flow paths within a filter housing, enhancing gas purity, shortening gas sticks, minimizing equipment size, and reducing the risk of leakage. This technology is applicable in gas sticks for semiconductor equipment, gas filtration devices, and industrial gas processing systems.

In 2022, Taekwang Fujikin initiated a nullity action with the Intellectual Property Trial and Appeal Board (IPTAB), challenging the patent’s validity. However, in September 2023, the IPTAB ruled in favor of Entegris, allowing the company to amend certain claims and dismissing the invalidation challenges against claims 2, 36, and 47. The tribunal also rejected challenges to claims 1, 4, 5, 8-11, 17-18, 20-24, 26, 28, 31, 35, and 38-42, based on the amended invention.

Dissatisfied with the ruling, Taekwang Fujikin filed an appeal with the Patent Court of Korea in October 2023 in an effort to overturn the IPTAB's decision. The most recent hearing in the case took place in June 2024. 

Meanwhile, in May 2024, Entegris filed a separate request to amend the patent, further bolstering its legal position in the ongoing dispute.

The outcome of the Korean dispute could have significant global implications, as Entegris holds corresponding patents in other key semiconductor markets. A ruling against Entegris in Korea could have influenced the status of its patents in the U.S., Europe, and Japan, potentially weakening its global protection of this core filtration technology.

Entegris' low-profile surface mount filter plays a crucial role in contamination control and gas filtration, both critical in modern semiconductor manufacturing. As chip production becomes increasingly sophisticated, with smaller transistor sizes and more demanding processes, the need for ultra-pure gases has only intensified, making Entegris' technology even more vital to the industry.